Laser decapsulation

LASERETCH LE-1064

Controlled laser ablation for semiconductor-package material removal.

LaserEtch LE-1064 is designed to remove selected semiconductor package encapsulant using a controlled laser-ablation process. It may be evaluated for cavity development, bulk material removal and pre-cavitation before a subsequent chemical, plasma or other approved package-opening process.

Package suitability, mold-compound composition, exposed materials, wire-bond metallurgy, cavity geometry, remaining encapsulant thickness and follow-on process requirements must be reviewed by Nisene engineering for each application.

View all decapsulation methods

Controlled laser removal of semiconductor package material

LaserEtch LE-1064 uses controlled laser ablation to remove selected bulk encapsulant and develop a defined cavity over a semiconductor package.

Depending on the package construction and analysis objective, laser processing may be evaluated as a standalone material-removal method or as a pre-cavitation stage before chemical or plasma decapsulation.

Potential purposes

  • Semiconductor failure analysis
  • Package pre-cavitation
  • Bulk encapsulant removal
  • Defined-area cavity development
  • Construction analysis
  • Counterfeit-component investigation
  • Reliability and qualification analysis
  • Package-specific laser-process development
  • Preparation before chemical decapsulation
  • Preparation before plasma decapsulation
Potential applications, package compatibility, cavity depth and follow-on process requirements remain subject to Nisene engineering review.

When LaserEtch may be the appropriate process route

Bulk encapsulant removal

Applications for which Nisene engineering determines that laser ablation should be evaluated for controlled removal of selected package material.

Pre-cavitation before further decapsulation

Applications requiring removal of bulk encapsulant before an approved chemical, plasma or other package-opening process.

Defined cavity development

Applications requiring controlled cavity geometry while maintaining an approved remaining-material margin above sensitive internal structures.

Package-specific process development

Applications requiring evaluation of laser settings, scan strategy, cavity geometry and follow-on processing for a particular package.

Final process selection depends on package construction, mold-compound composition, filler content, die location, wire and metallization materials, target cavity geometry and analysis objective.

Designed for controlled laser-process development

Core capabilities of the supplied LE-1064 configuration.

Laser source

Air-cooled 1064-nm fibre laser with 30-W average output power.

Controlled beam scanning

XY scanning-mirror galvanometer with a 110 × 110 mm decapsulation range.

Live camera view

Real-time process observation through integrated cameras and viewing windows.

Optical viewing and positioning

1–18× laser zoom and a laser-pointer focus aid support sample positioning.

Adjustable process parameters

Configured laser settings support package-specific process development.

Cavity-pattern development

Approved geometric patterns may be used to control the area and shape of material removal.

Image and process documentation

The system may support capture or retention of process-related images, subject to current configuration verification.

Operator interface

Windows-based ablation software provides process control and system operation.

Controlled material removal through laser ablation

Laser ablation removes selected package material through controlled application of laser energy over a defined processing area.

The applicable laser conditions depend on mold-compound composition, filler content, package geometry, exposed materials, target cavity dimensions and the required remaining-material margin.

This page does not provide a laser-processing recipe. Laser power, pulse characteristics, frequency, scanning speed, hatch spacing, focal position, processing depth, pass count and endpoint criteria must be established only through approved Nisene documentation, training and applications-engineering support.

Viewing and alignment during cavity development

Camera-assisted positioning

The viewing system supports positioning of the target package area before processing.

Optical magnification

Available magnification supports evaluation of package features and cavity location, subject to current model confirmation.

Live process observation

The operator may observe the processing area through the system interface, subject to the current configuration and approved safety controls.

Image capture

Image-saving or documentation functions remain subject to verification against the current system software and configuration.

Application-specific cavity geometry

Defined processing area

The laser path may be configured for an approved cavity area and shape.

Controlled material removal

Material removal must be developed with an approved remaining-material margin above sensitive internal structures.

Multiple-pass processing

A process may use more than one approved pass or stage, subject to package requirements and system capability.

Follow-on decapsulation planning

The cavity must be developed with the intended chemical, plasma, inspection or other follow-on process in mind.

Cavity depth, remaining encapsulant thickness and endpoint criteria must be confirmed for each application.

Positioning and handling configurations

Manual sample positioning

Sample positioning may be carried out using the supplied standard arrangement, subject to current configuration.

Motorized vertical positioning

A motorized vertical-axis option may be available, subject to current product configuration and quotation.

Motorized multi-axis positioning

Motorized multi-axis positioning may be available for approved applications, subject to engineering review.

Tray or batch-handling options

Automated tray or batch-handling capability must be confirmed from the current product configuration and quotation.

Control of laser-generated process emissions

Local extraction

The supplied extraction arrangement must be positioned and operated according to approved installation documentation.

Filtration configuration

Filter stages and filter-media requirements depend on the supplied system configuration.

System interlock

Any interface or interlock between the laser system and extraction equipment is confirmed for the supplied configuration.

Maintenance planning

Filter inspection, replacement and disposal requirements must be established through the approved maintenance documentation.

Laser processing may generate fumes, particulates and decomposition products. The system must not be operated without the approved extraction and filtration configuration.

From package review to examination

Step 1

Review the package

Identify package construction, dimensions, mold compound, filler content, die location, wire and metallization materials and required exposure area.

Step 2

Confirm laser suitability

Nisene applications engineering reviews whether laser ablation or pre-cavitation should be evaluated.

Step 3

Define the cavity objective

Confirm the approved cavity area, geometry, remaining-material margin and intended follow-on process.

Step 4

Position and focus the sample

Use the approved sample arrangement, alignment method and focus procedure.

Step 5

Select an approved process

Recall or establish approved laser, scan, cavity-pattern and pass parameters.

Step 6

Run the controlled sequence

Process the sample according to the equipment manual, approved laboratory procedures and applicable laser-safety requirements.

Step 7

Inspect and route the sample

Review the cavity and proceed to the approved inspection, chemical, plasma or other follow-on process.

Laser package processing, extraction-system operation and sample handling must be carried out only by trained personnel in an appropriately equipped laboratory using approved enclosures, interlocks, extraction, fixtures, personal protective equipment, safety documentation and site procedures.

Technical specifications

Published specifications are shown below.

Specification LaserEtch LE-1064
Process type Laser ablation of semiconductor package material
Primary application Cavity development and pre-cavitation, subject to engineering review
Laser source Air-cooled 1064-nm fibre laser
Average output power 30 W
Pulse width 4–200 ns, selectable
Pulse frequency 1–4000 kHz
Decapsulation range 110 × 110 mm
Beam scanning XY scanning-mirror galvanometer
Optical zoom 1–18×
Cooling Air-cooled integrated controller
Laser safety Class 1 enclosure with door interlocks and laser-safe viewing window
Extraction Fume and dust extractor
Software Windows-based ablation software
Process viewing Real-time observation through cameras and viewing windows
System dimensions 1040 × 700 × 600 mm

Select the appropriate package-opening method

Chemical decapsulation

JetEtch configurations

JetEtch configurations use controlled chemical processing for defined-area package decapsulation.

Explore chemical decapsulation
Plasma decapsulation

PlasmaEtch PE-1000

PlasmaEtch PE-1000 uses microwave-induced plasma under vacuum for dry package decapsulation.

Explore PlasmaEtch PE-1000
Laser decapsulation

LaserEtch LE-1064

LaserEtch LE-1064 uses controlled laser ablation for cavity development, bulk material removal and approved pre-cavitation workflows.

You are viewing LaserEtch LE-1064
Mechanical opening

Mechanical package opening

Mechanical tools remove selected lids or caps from compatible hermetic packages.

Explore mechanical opening
Method selection and any combination of laser, chemical, plasma or mechanical processing must be confirmed with Nisene applications engineering.

Plan the complete package-opening route

Laser-only evaluation

Selected applications may be evaluated using laser processing alone, subject to engineering confirmation.

Laser followed by chemical decapsulation

Laser pre-cavitation may reduce bulk encapsulant before an approved chemical-decapsulation stage.

Laser followed by plasma decapsulation

Laser pre-cavitation may be evaluated before an approved plasma-decapsulation stage.

Method not yet determined

Nisene applications engineering can review the package and recommend an evaluation route.

A follow-on process must not be assumed solely from package type or wire material.

Application-specific compatibility review

Package families

BGA QFN / DFN QFP / TQFP SOIC / SOP DIP PLCC CSP / WLCSP Multi-die packages Stacked packages Small-form packages Thick packages Custom packages

Wire and internal materials

Copper wire Palladium-coated copper Gold wire Aluminum wire Silver wire Mixed or unknown metallurgy Sensitive exposed metallization Material composition unknown

Mold-compound categories

Standard epoxy mold compound High-filler mold compound Composition unknown Custom or non-standard encapsulant

Compatibility depends on package construction, mold-compound chemistry, filler content, dimensions, die location, wire and metallization materials, target cavity geometry, remaining-material margin and intended follow-on process.

No package, wire material, metallization, mold compound or cavity geometry should be represented as supported until reviewed by Nisene applications engineering.

Review representative LaserEtch results

Representative results. Contact Nisene for application examples relevant to your packages.

Prepare the laboratory

Published specifications are shown below.

Electrical supply

Supply requirements depend on the supplied configuration and destination territory.

Laser-safe enclosure and interlocks

The supplied enclosure, door interlocks, emergency controls and access restrictions must be confirmed for the current system configuration.

Extraction and filtration

Extraction capacity, filter stages, exhaust routing and filter-management requirements must be confirmed before installation.

Equipment clearance and service access

Clearance, supporting surface and service-access requirements

Workstation and software environment

Computer, operating-system, network and data-management requirements depend on the current supplied configuration.

Safety monitoring and site integration

Monitoring, interlock and site-integration requirements

Final installation requirements depend on the supplied laser, motion, camera, extraction and software configuration, destination, applicable regulations and customer site conditions.

Request facility requirements

Safety is part of the installation

Installation and operating responsibility

LaserEtch LE-1064 must be installed and operated only in an appropriately equipped laboratory by trained personnel. Customers are responsible for site-specific risk assessment, laser safety, enclosure and interlock integrity, electrical safety, extraction, filtration, process emissions, sample handling, personal protective equipment and compliance with applicable regulations.

Applicable compliance, declaration, laser-safety, extraction and installation documentation will be identified for the quoted system and destination and supplied where applicable.

Support throughout the equipment lifecycle

Applications engineering

Package review, cavity-definition review, follow-on process planning and laser-process development support for unfamiliar or challenging applications.

Installation and training

Available in accordance with the quotation, system configuration and applicable territory.

Service and repair

Technical diagnosis, repair and maintenance for supported laser, motion, camera, software and extraction components.

Spare parts, fixtures and process components

Replacement components, sample fixtures, extraction filters, motion components and consumables subject to current availability.

LaserEtch LE-1064 document

Download the available approved documents directly.

Discuss your LaserEtch application

Tell us about the package, mold compound, wire and metallization materials, target cavity and intended follow-on process. Nisene will review whether LaserEtch LE-1064 is appropriate and advise on system configuration, process development and the evaluation route.

Nisene Technology Group
Based in Watsonville, California, USA.
417A Salinas Road, Watsonville, CA 95076, USA
sales@nisene.com
service@nisene.com
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Send an enquiry

Tell us the system, the package type and what you need to achieve, and our applications team will respond.

Email sales@nisene.com Service and RMA

Nisene Technology Group, 417A Salinas Road, Watsonville, CA 95076, USA